非接觸式金屬膜厚測量儀
昊量光電新推出用于導(dǎo)電薄膜和薄金屬層膜厚測量的非接觸式金屬膜厚測量儀EddyCus TF Series，這款金屬膜厚測量儀可以非接觸式實(shí)時測量，對導(dǎo)電薄膜的膜厚精確測量，表征已被隱藏和封裝的導(dǎo)電層，并把測量數(shù)據(jù)保存和導(dǎo)出。
非接觸式金屬膜厚測量儀主要測試對象：
鍍膜建筑玻璃，如LowE
顯示器，觸摸屏和平板顯示器
OLED和LED
智能玻璃
石墨烯層
光伏晶圓和電池
半導(dǎo)體晶片
金屬化層和晶圓金屬化
電池電極
導(dǎo)電涂布紙和導(dǎo)電紡織品
單點(diǎn)金屬膜厚測量儀EddyCus TF lab 2020MT
單點(diǎn)金屬膜厚測量儀EddyCus TF lab 2020MT可以對透明和非透明層的非接觸金屬厚度進(jìn)行測量。測量是通過非接觸式渦流傳感器實(shí)現(xiàn)的。它可以實(shí)時地對已知或確切的常數(shù)電導(dǎo)率的材料的進(jìn)行厚度測量。這種非接觸測試技術(shù)能夠在較寬的厚度范圍內(nèi)進(jìn)行精確測量，從幾納米厚度開始，一直到厚金屬板的表征。電渦流技術(shù)還能夠?qū)Ρ挥泻Σ牧细采w的金屬層進(jìn)行表征。單點(diǎn)金屬膜厚測量儀也可以為非常薄的膜層以及非常厚的金屬和普通合金提供特定的材料設(shè)置。該測量方法具有的魯棒性和高重復(fù)性和高精度。此外，它不需要任何光學(xué)透明度，也不用物理接觸。
軟件和設(shè)備控制：
非接觸式金屬膜厚測量儀規(guī)格參數(shù)：
| Measurement technology | Non-contact eddy current sensor |
| Substrates | Foil, glass, wafer, etc. |
| Substrate area | 8 inch / 204 mm x 204 mm (open on three sides) |
| Max. sample thickness/ sensor gap | 3 / 5 / 10 / 25 mm (defined by the thickest sample) |
Metal thickness range
Accuracies depend on the selected setup and the type /
conductivity of the metal (e.g. copper, aluminum, silver) | Low 1 – 10 nm; 2 – 5 % accuracy
Standard 10 – 1,000 nm; 1 – 3 % accuracy
High 1 – 100 µm; 0.5 – 3 % accuracy |
| Metal thickness calibration | Direct thickness calibration / sheet resistance conversion |
| Device dimensions (w/h/d) | 11.4” x 5.5” x 17.5” / 290 mm x 140 mm x 445 mm |
| Weight | 10 kg |
| Further available features / other tool configurations | Sheet resistance measurement / conductivity / resistivity / electrical anisotropy / permeability (beta) |
非接觸式金屬膜厚成像測量儀EddyCus TF map 2530MT
非接觸式金屬膜厚成像測量儀EddyCus TF map 2530MT是一種非接觸式厚度成像系統(tǒng)。這款金屬膜厚成像設(shè)備利用非接觸式渦流傳感器來確定任何已知電導(dǎo)率或特征電導(dǎo)率剖面，如金屬或合金材料的厚度。這種非接觸式測試技術(shù)可以在較寬的厚度范圍內(nèi)進(jìn)行精確測量，厚度范圍從幾納米到毫米。此外，它還可以應(yīng)用于非導(dǎo)電材料封裝的薄膜。該測量方法具有良好的魯棒性和較高的重復(fù)性和精度。它不受光學(xué)特性的影響，有利于各種生產(chǎn)非透明金屬薄膜的行業(yè)。這種緊湊的臺式系統(tǒng)用于制造研發(fā)和測試實(shí)驗(yàn)室的快速測試或系統(tǒng)質(zhì)量保證的廣泛應(yīng)用。
軟件和設(shè)備控制：
非常用戶友好的軟件
實(shí)時映射測量
易于使用的統(tǒng)計(jì)分析選項(xiàng)
預(yù)定義的測量和產(chǎn)品配方(尺寸、音高、閾值)
直線掃描，直方圖和區(qū)域分析
黑色和彩色圖像編碼
Csv & PDF導(dǎo)出
PC匯總導(dǎo)出
用于參數(shù)轉(zhuǎn)換的材料數(shù)據(jù)庫
邊緣效應(yīng)的補(bǔ)償
數(shù)據(jù)的存儲和導(dǎo)入
導(dǎo)出數(shù)據(jù)集(如eddyva, MS Excel, Origin)
非接觸式金屬膜厚測量儀規(guī)格參數(shù)：
| Measurement technology | Non-contact eddy current sensor |
| Substrates | Wafer, glass, foil, etc. |
| Max. scanning area | 12 inch / 300 mm x 300 mm (larger upon request) |
| Edge effect correction / exclusion | 2 – 10 mm (depending on size, range, setup and requirements) |
| Max. sample thickness / sensor gap | 3 / 5 / 10 / 25 mm (defined by the thickest sample) |
Metal thickness range
Accuracies depend on the selected setup and the type /
conductivity of the metal (e.g. copper, aluminum, silver) | Low 1 – 10 nm; 2 – 5 % accuracy
Standard 10 – 1,000 nm; 1 – 3 % accuracy
High 1 – 100 µm; 0.5 – 3 % accuracy |
| Metal thickness calibration | Direct thickness calibration / sheet resistance conversion |
| Sheet resistance range (optional) | 0.1 mOhm/sq – 100,000 Ohm/sq (in 5 ranges) |
| Scanning pitch (X and Y) | 1 / 2.5 / 5 / 10 / 25 mm |
| Scanning time | 8 inch / 200 mm x 200 mm in 1.5 to 15 minutes (1 – 10 mm pitch)
12 inch / 300 mm x 300 mm in 2 to 15 minutes (2.5 – 25 mm pitch) |
| Device dimensions (w/h/d) / weight | 31.5” x 19.1” x 33.5” / 785 mm x 486 mm x 850 mm / 90 kg |
| Further available features / other tool configurations | Sheet resistance measurement / conductivity / resistivity / anisotropy / permeability (beta) |
手持式金屬膜厚測量儀EddyCus TF portable1010
手持式金屬膜厚測量儀EddyCus TF portable1010一種方便和便攜的測量設(shè)備，用于生產(chǎn)或現(xiàn)場的大型玻璃和金屬箔的快速接觸測量，例如在制造后的快速質(zhì)量檢查或作為來料良好的檢查。手持設(shè)備允許測量甚至隱藏和封裝層。這是一個易于使用的設(shè)備，通過觸摸顯示器控制。
| Measurement technology | Eddy current sensor |
| Measurement mode | Realtime at constant distance / contact |
| Substrates | Glass, plates, foils etc. |
| Substrate sizes | Flat samples > 150 mm x 150 mm (6 inch x 6 inch) Curved editions are available for several applications |
| Measurement spot / high sensitivity zone | 40 mm diameter (1.6 inch) |
| Power | Lithium ion battery up to 20 h |
Metal thickness range (four setups available)
very low: 0.001 – 0.1 Ohm/sq
Type low: 0.04 – 0.1 Ohm/sq
Type standard: 0.3 – 30 Ohm/sq
Type high: 0.3 – 50 Ohm/sq | Range depends on material conductivity. Examples: CuAlAgTi0.17 – 17 µm0.27 – 27 µm0.16 – 15 µm5.5 – 550 µm170 – 425 nm270 – 675 nm155 – 380 nm5.5 – 13 nm0.6 – 56 nm0.9 – 90 nm0.5 – 50 nm0.018 – 1.85 µm0.4 – 56 nm0.6 – 90 nm0.3 – 50 nm0.013 – 1.85 µm |
| Sheet resistance measurement | Available as additional feature, 5 ranges are available between 0.001 to 100 Ohm/sq |
| Accuracy (for planar solid surfaces, e.g. glass) | <> |
| Dlay | 2.8 inch colored touch screen |
| Device dimensions (w/h/d) @ weight | 3.5” x 7” x 1.9” / 87 mm x 178 mm x 48 mm @ 340g |
| Interfaces | Bluetooth (optional) + data center |
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